On-chip Diode Temperature Sensors on InP-based Generic Foundry Platform

Wenjing Tian, Dylan Harmsen, Ozan Çirkinoglu, Bart Bas, Pascal van den Berg, Roel de Meulder, Dzmitry Pustakhod, Kevin Williams, Xaveer Leijtens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)

Abstract

We developed two types of diode temperature sensors on the InP-based generic foundry platform, with no process adaptations required. These sensors showed sensitivity from -1.1 to - 2.1 mV/K and were not affected by on-chip light.
Original languageEnglish
Title of host publication2023 Opto-Electronics and Communications Conference, OECC 2023
PublisherInstitute of Electrical and Electronics Engineers
Pages1-4
Number of pages4
ISBN (Electronic)978-1-6654-6213-6
DOIs
Publication statusPublished - 14 Aug 2023
Event2023 Opto-Electronics and Communications Conference, OECC 2023 - Shanghai, China
Duration: 2 Jul 20236 Jul 2023

Conference

Conference2023 Opto-Electronics and Communications Conference, OECC 2023
Country/TerritoryChina
CityShanghai
Period2/07/236/07/23

Funding

This work was supported by Microsoft Research through its Ph.D. Scholarship Programme.

FundersFunder number
Microsoft Research

    Keywords

    • Photonic Integration.
    • Temperature Sensors
    • Thermal Management

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