@inproceedings{f4bf22df8ca9443d8748117296398702,
title = "Offset printing of liquid microstructures for high resolution lithography",
abstract = "We have investigated the direct printing of polymer solutions from a chemically patterned stamp onto a hydrophilic target substrate as a new high-throughput alternative to optical lithography. The patterns on the stamp, which are typically in the micron size range, define regions of alternating wettability. They are produced by patterning a hydrophobic self-assembled monolayer previously deposited onto a hydrophilic surface, typically a glass slide or silicon wafer with a natural oxide coating. Polar liquids or aqueous polymeric solutions are then deposited only onto the hydrophilic surface patterns by dip-coating the stamp in a liquid reservoir. The deposited film thickness depends critically on the speed of withdrawal and the feature size and shape. For vertically oriented hydrophilic stripes dipped in a reservoir containing a polar liquid, we have developed a theoretical model whose prediction for the maximum deposited film thickness agrees exceptionally well with experimental measurements. After deposition, the wetted stamp is pressed against a target substrate by means of a motion controlled press. In this way we have so far printed 5µm wide polyethylene oxide lines onto a silicon wafer.",
author = "S.M. Miller and A.A. Darhuber and S.M. Troian and S. Wagner",
year = "2000",
doi = "10.1557/PROC-624-47",
language = "English",
isbn = "1-55899-532-3",
series = "Materials Research Society symposium proceedings ",
publisher = "Materials Research Society",
pages = "47--52",
booktitle = "Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.",
address = "United States",
}