Skip to main navigation Skip to search Skip to main content

Numerical simulation of wet-chemical etching

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original languageEnglish
Title of host publicationProceedings 16th International Conference on Numerical Methods in Fluid Dynamics (Arcachon, France, July 6-10, 1998)
EditorsC.H. Bruneau
Place of PublicationBerlin
PublisherSpringer
Pages470-475
ISBN (Print)3-540-65153-5
Publication statusPublished - 1998

Publication series

NameLecture Notes in Physics
Volume515
ISSN (Print)0075-8450

Cite this