Novel illumination design for a scatterometry facility

R.K. Mutnuru, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Design and Technology of Instrumentation (DTI)

    Research output: ThesisPd Eng Thesis

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    Supervisors/Advisors
    • Botman, Jan, Supervisor
    • Kuiper, Hans, External supervisor, External person
    Award date1 Jan 2010
    Place of PublicationEindhoven
    Publisher
    Print ISBNs978-90-444-0932-1
    Publication statusPublished - 2010

    Bibliographical note

    Eindverslag, confidential

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