Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

M. Domanski, R. Luttge, E. Lamers, A.J.A. Winnubst, X.F. Walboomers, J.A. Jansen, J.G.E. Gardeniers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.
Original languageEnglish
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands
Place of PublicationSan Diego
PublisherChemical and Biological Microsystems Society
Pages518-520
Volume1
ISBN (Print)9781618390622
Publication statusPublished - 2010
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010) - Groningen, Netherlands
Duration: 3 Oct 20107 Oct 2010
Conference number: 14
http://www.microtasconferences.org/microtas2010/

Conference

Conference14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010)
Abbreviated titleMicroTAS 2010
CountryNetherlands
CityGroningen
Period3/10/107/10/10
Internet address

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