Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

M. Domanski, R. Luttge, E. Lamers, A.J.A. Winnubst, X.F. Walboomers, J.A. Jansen, J.G.E. Gardeniers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.
Original languageEnglish
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands
Place of PublicationSan Diego
PublisherChemical and Biological Microsystems Society
Pages518-520
Volume1
ISBN (Print)9781618390622
Publication statusPublished - 2010
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010) - Groningen, Netherlands
Duration: 3 Oct 20107 Oct 2010
Conference number: 14
http://www.microtasconferences.org/microtas2010/

Conference

Conference14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010)
Abbreviated titleMicroTAS 2010
CountryNetherlands
CityGroningen
Period3/10/107/10/10
Internet address

Fingerprint

grooves
lithography
titanium
etching
nanofabrication
silicon
regeneration
bones
cryogenics
chlorine
aspect ratio
ridges
grade
ions
gratings
interference
lasers

Cite this

Domanski, M., Luttge, R., Lamers, E., Winnubst, A. J. A., Walboomers, X. F., Jansen, J. A., & Gardeniers, J. G. E. (2010). Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands (Vol. 1, pp. 518-520). San Diego: Chemical and Biological Microsystems Society.
Domanski, M. ; Luttge, R. ; Lamers, E. ; Winnubst, A.J.A. ; Walboomers, X.F. ; Jansen, J.A. ; Gardeniers, J.G.E. / Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. Vol. 1 San Diego : Chemical and Biological Microsystems Society, 2010. pp. 518-520
@inproceedings{49f98f7348d041e59801643f783be78b,
title = "Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching",
abstract = "Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.",
author = "M. Domanski and R. Luttge and E. Lamers and A.J.A. Winnubst and X.F. Walboomers and J.A. Jansen and J.G.E. Gardeniers",
year = "2010",
language = "English",
isbn = "9781618390622",
volume = "1",
pages = "518--520",
booktitle = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands",
publisher = "Chemical and Biological Microsystems Society",

}

Domanski, M, Luttge, R, Lamers, E, Winnubst, AJA, Walboomers, XF, Jansen, JA & Gardeniers, JGE 2010, Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. in 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. vol. 1, Chemical and Biological Microsystems Society, San Diego, pp. 518-520, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, Netherlands, 3/10/10.

Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. / Domanski, M.; Luttge, R.; Lamers, E.; Winnubst, A.J.A.; Walboomers, X.F.; Jansen, J.A.; Gardeniers, J.G.E.

14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. Vol. 1 San Diego : Chemical and Biological Microsystems Society, 2010. p. 518-520.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

AU - Domanski, M.

AU - Luttge, R.

AU - Lamers, E.

AU - Winnubst, A.J.A.

AU - Walboomers, X.F.

AU - Jansen, J.A.

AU - Gardeniers, J.G.E.

PY - 2010

Y1 - 2010

N2 - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

AB - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

M3 - Conference contribution

SN - 9781618390622

VL - 1

SP - 518

EP - 520

BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands

PB - Chemical and Biological Microsystems Society

CY - San Diego

ER -

Domanski M, Luttge R, Lamers E, Winnubst AJA, Walboomers XF, Jansen JA et al. Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. Vol. 1. San Diego: Chemical and Biological Microsystems Society. 2010. p. 518-520