Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

M. Domanski; R. Luttge; E. Lamers; A.J.A. Winnubst; X.F. Walboomers; J.A. Jansen; J.G.E. Gardeniers

Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

M. Domanski, R. Luttge, E. Lamers, A.J.A. Winnubst, X.F. Walboomers, J.A. Jansen, J.G.E. Gardeniers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

Original language	English
Title of host publication	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands
Place of Publication	San Diego
Publisher	Chemical and Biological Microsystems Society
Pages	518-520
Volume	1
ISBN (Print)	9781618390622
Publication status	Published - 2010
Event	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010) - Groningen, Netherlands Duration: 3 Oct 2010 → 7 Oct 2010 Conference number: 14 http://www.microtasconferences.org/microtas2010/

Conference

Conference	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010)
Abbreviated title	MicroTAS 2010
Country	Netherlands
City	Groningen
Period	3/10/10 → 7/10/10
Internet address	http://www.microtasconferences.org/microtas2010/

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Domanski, M., Luttge, R., Lamers, E., Winnubst, A. J. A., Walboomers, X. F., Jansen, J. A., & Gardeniers, J. G. E. (2010). Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands (Vol. 1, pp. 518-520). Chemical and Biological Microsystems Society.

Domanski, M. ; Luttge, R. ; Lamers, E. ; Winnubst, A.J.A. ; Walboomers, X.F. ; Jansen, J.A. ; Gardeniers, J.G.E. / Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. Vol. 1 San Diego : Chemical and Biological Microsystems Society, 2010. pp. 518-520

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title = "Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching",

abstract = "Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.",

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publisher = "Chemical and Biological Microsystems Society",

note = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), MicroTAS 2010 ; Conference date: 03-10-2010 Through 07-10-2010",

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Domanski, M, Luttge, R, Lamers, E, Winnubst, AJA, Walboomers, XF, Jansen, JA & Gardeniers, JGE 2010, Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. in 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. vol. 1, Chemical and Biological Microsystems Society, San Diego, pp. 518-520, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), Groningen, Netherlands, 3/10/10.

Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. / Domanski, M.; Luttge, R.; Lamers, E.; Winnubst, A.J.A.; Walboomers, X.F.; Jansen, J.A.; Gardeniers, J.G.E.

14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. Vol. 1 San Diego : Chemical and Biological Microsystems Society, 2010. p. 518-520.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

AU - Domanski, M.

AU - Luttge, R.

AU - Lamers, E.

AU - Winnubst, A.J.A.

AU - Walboomers, X.F.

AU - Jansen, J.A.

AU - Gardeniers, J.G.E.

N1 - Conference code: 14

PY - 2010

Y1 - 2010

N2 - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

AB - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

M3 - Conference contribution

SN - 9781618390622

VL - 1

SP - 518

EP - 520

BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands

PB - Chemical and Biological Microsystems Society

CY - San Diego

T2 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010)

Y2 - 3 October 2010 through 7 October 2010

ER -

Domanski M, Luttge R, Lamers E, Winnubst AJA, Walboomers XF, Jansen JA et al. Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. Vol. 1. San Diego: Chemical and Biological Microsystems Society. 2010. p. 518-520