Abstract
| Original language | English |
|---|---|
| Title of host publication | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands |
| Place of Publication | San Diego |
| Publisher | Chemical and Biological Microsystems Society |
| Pages | 518-520 |
| Volume | 1 |
| ISBN (Print) | 9781618390622 |
| Publication status | Published - 2010 |
| Event | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010) - Groningen, Netherlands Duration: 3 Oct 2010 → 7 Oct 2010 Conference number: 14 http://www.microtasconferences.org/microtas2010/ |
Conference
| Conference | 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010) |
|---|---|
| Abbreviated title | MicroTAS 2010 |
| Country | Netherlands |
| City | Groningen |
| Period | 3/10/10 → 7/10/10 |
| Internet address |
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Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. / Domanski, M.; Luttge, R.; Lamers, E.; Winnubst, A.J.A.; Walboomers, X.F.; Jansen, J.A.; Gardeniers, J.G.E.
14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands. Vol. 1 San Diego : Chemical and Biological Microsystems Society, 2010. p. 518-520.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching
AU - Domanski, M.
AU - Luttge, R.
AU - Lamers, E.
AU - Winnubst, A.J.A.
AU - Walboomers, X.F.
AU - Jansen, J.A.
AU - Gardeniers, J.G.E.
PY - 2010
Y1 - 2010
N2 - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.
AB - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.
M3 - Conference contribution
SN - 9781618390622
VL - 1
SP - 518
EP - 520
BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2010), 3-7 October 2010, Groningen, The Netherlands
PB - Chemical and Biological Microsystems Society
CY - San Diego
ER -