Non-hermetic cable design to enable high voltage in low & medium vacuum

A.B.J.M. Driessen; J. van Duivenbode; P.A.A.F. Wouters

doi:10.23919/INSUCON.2017.8097193

Non-hermetic cable design to enable high voltage in low & medium vacuum

A.B.J.M. Driessen
, J. van Duivenbode
, P.A.A.F. Wouters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

Abstract

Future generation lithography machines require a significant increase in actuation power of the moving stages, in order to ensure the continuous demand for improved productivity. Higher current levels to the actuators could achieve this, but it requires thicker conductors which increases mass and hampers flexibility. Operation of modern extreme ultraviolet (EUV) lithography machines demand a high flexibility of the cables to ensure a lifespan of 109 movements. The option pursued here, therefore, is higher voltage, i.e. a value possibly exceeding the Paschen minimum, whereas the operating pressure may go down to 0.1 Pa.

Original language	English
Title of host publication	13th International Electrical Insulation Conference, INSUCON 2017
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Number of pages	6
ISBN (Electronic)	978-1-9998-1569-1
DOIs	https://doi.org/10.23919/INSUCON.2017.8097193
Publication status	Published - 3 Nov 2017
Event	13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom - Birmingham, United Kingdom Duration: 16 May 2017 → 18 May 2017 https://www.ieee.org/conferences_events/conferences/conferencedetails/index.html?Conf_ID=38042

Conference

Conference	13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom
Abbreviated title	INSUCON2017
Country/Territory	United Kingdom
City	Birmingham
Period	16/05/17 → 18/05/17
Internet address	https://www.ieee.org/conferences_events/conferences/conferencedetails/index.html?Conf_ID=38042

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10.23919/INSUCON.2017.8097193

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@inproceedings{5062df5d35774592b65b7b8954bee21a,

title = "Non-hermetic cable design to enable high voltage in low \& medium vacuum",

abstract = "Future generation lithography machines require a significant increase in actuation power of the moving stages, in order to ensure the continuous demand for improved productivity. Higher current levels to the actuators could achieve this, but it requires thicker conductors which increases mass and hampers flexibility. Operation of modern extreme ultraviolet (EUV) lithography machines demand a high flexibility of the cables to ensure a lifespan of 109 movements. The option pursued here, therefore, is higher voltage, i.e. a value possibly exceeding the Paschen minimum, whereas the operating pressure may go down to 0.1 Pa.",

author = "A.B.J.M. Driessen and \{van Duivenbode\}, J. and P.A.A.F. Wouters",

year = "2017",

month = nov,

day = "3",

doi = "10.23919/INSUCON.2017.8097193",

language = "English",

booktitle = "13th International Electrical Insulation Conference, INSUCON 2017",

publisher = "Institute of Electrical and Electronics Engineers",

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note = "13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom, INSUCON2017 ; Conference date: 16-05-2017 Through 18-05-2017",

url = "https://www.ieee.org/conferences\_events/conferences/conferencedetails/index.html?Conf\_ID=38042",

}

Driessen, ABJM, van Duivenbode, J & Wouters, PAAF 2017, Non-hermetic cable design to enable high voltage in low & medium vacuum. in 13th International Electrical Insulation Conference, INSUCON 2017., 08097193, Institute of Electrical and Electronics Engineers, Piscataway, 13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom, Birmingham, United Kingdom, 16/05/17. https://doi.org/10.23919/INSUCON.2017.8097193

Non-hermetic cable design to enable high voltage in low & medium vacuum. / Driessen, A.B.J.M.; van Duivenbode, J.; Wouters, P.A.A.F.
13th International Electrical Insulation Conference, INSUCON 2017. Piscataway: Institute of Electrical and Electronics Engineers, 2017. 08097193.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Non-hermetic cable design to enable high voltage in low & medium vacuum

AU - Driessen, A.B.J.M.

AU - van Duivenbode, J.

AU - Wouters, P.A.A.F.

PY - 2017/11/3

Y1 - 2017/11/3

N2 - Future generation lithography machines require a significant increase in actuation power of the moving stages, in order to ensure the continuous demand for improved productivity. Higher current levels to the actuators could achieve this, but it requires thicker conductors which increases mass and hampers flexibility. Operation of modern extreme ultraviolet (EUV) lithography machines demand a high flexibility of the cables to ensure a lifespan of 109 movements. The option pursued here, therefore, is higher voltage, i.e. a value possibly exceeding the Paschen minimum, whereas the operating pressure may go down to 0.1 Pa.

AB - Future generation lithography machines require a significant increase in actuation power of the moving stages, in order to ensure the continuous demand for improved productivity. Higher current levels to the actuators could achieve this, but it requires thicker conductors which increases mass and hampers flexibility. Operation of modern extreme ultraviolet (EUV) lithography machines demand a high flexibility of the cables to ensure a lifespan of 109 movements. The option pursued here, therefore, is higher voltage, i.e. a value possibly exceeding the Paschen minimum, whereas the operating pressure may go down to 0.1 Pa.

UR - https://www.scopus.com/pages/publications/85040578975

U2 - 10.23919/INSUCON.2017.8097193

DO - 10.23919/INSUCON.2017.8097193

M3 - Conference contribution

BT - 13th International Electrical Insulation Conference, INSUCON 2017

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

T2 - 13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom

Y2 - 16 May 2017 through 18 May 2017

ER -

Non-hermetic cable design to enable high voltage in low & medium vacuum

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