Non-hermetic cable design to enable high voltage in low & medium vacuum

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Abstract

Future generation lithography machines require a significant increase in actuation power of the moving stages, in order to ensure the continuous demand for improved productivity. Higher current levels to the actuators could achieve this, but it requires thicker conductors which increases mass and hampers flexibility. Operation of modern extreme ultraviolet (EUV) lithography machines demand a high flexibility of the cables to ensure a lifespan of 109 movements. The option pursued here, therefore, is higher voltage, i.e. a value possibly exceeding the Paschen minimum, whereas the operating pressure may go down to 0.1 Pa.
Original languageEnglish
Title of host publication13th International Electrical Insulation Conference, INSUCON 2017
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)978-1-9998-1569-1
DOIs
Publication statusPublished - 3 Nov 2017
Event13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom - Birmingham, United Kingdom
Duration: 16 May 201718 May 2017
https://www.ieee.org/conferences_events/conferences/conferencedetails/index.html?Conf_ID=38042

Conference

Conference13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom
Abbreviated titleINSUCON2017
CountryUnited Kingdom
CityBirmingham
Period16/05/1718/05/17
Internet address

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