Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.
|Title of host publication||2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario|
|Place of Publication||Piscataway|
|Publisher||Institute of Electrical and Electronics Engineers|
|Publication status||Published - Oct 2016|