Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface

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4 Citations (Scopus)

Abstract

Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.
Original languageEnglish
Title of host publication2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Pages424-427
ISBN (Electronic)978-1-5090-4654-6
DOIs
Publication statusPublished - Oct 2016

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