Non-hermetic cable connection to enable high voltage in  low & medium vacuum: identification of critical cable interface

A.B.J.M. Driessen; J. van Duivenbode; P.A.A.F. Wouters

doi:10.1109/CEIDP.2016.7785579

Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface

A.B.J.M. Driessen, J. van Duivenbode, P.A.A.F. Wouters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

Abstract

Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.

Original language	English
Title of host publication	2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	424-427
ISBN (Electronic)	978-1-5090-4654-6
DOIs	https://doi.org/10.1109/CEIDP.2016.7785579
Publication status	Published - Oct 2016

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10.1109/CEIDP.2016.7785579

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Driessen, A. B. J. M., van Duivenbode, J., & Wouters, P. A. A. F. (2016). Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. In 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario (pp. 424-427). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CEIDP.2016.7785579

Driessen, A.B.J.M. ; van Duivenbode, J. ; Wouters, P.A.A.F. / Non-hermetic cable connection to enable high voltage in low & medium vacuum : identification of critical cable interface. 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Piscataway : Institute of Electrical and Electronics Engineers, 2016. pp. 424-427

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abstract = "Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.",

author = "A.B.J.M. Driessen and {van Duivenbode}, J. and P.A.A.F. Wouters",

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doi = "10.1109/CEIDP.2016.7785579",

language = "English",

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Driessen, ABJM, van Duivenbode, J & Wouters, PAAF 2016, Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. in 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Institute of Electrical and Electronics Engineers, Piscataway, pp. 424-427. https://doi.org/10.1109/CEIDP.2016.7785579

Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. / Driessen, A.B.J.M.; van Duivenbode, J.; Wouters, P.A.A.F.
2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Piscataway: Institute of Electrical and Electronics Engineers, 2016. p. 424-427.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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N2 - Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.

AB - Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.

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PB - Institute of Electrical and Electronics Engineers

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Driessen ABJM, van Duivenbode J , Wouters PAAF. Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. In 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Piscataway: Institute of Electrical and Electronics Engineers. 2016. p. 424-427 doi: 10.1109/CEIDP.2016.7785579

Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface

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