Non equilibrium characterization and spectroscopic analysis of an inductively coupled argon plasma

J.J.A.M. Mullen, van der, S. Nowak, A.C.A.P. van Lammeren, D.C. Schram, B. Sijde, van der

Research output: Contribution to journalArticleAcademicpeer-review

32 Citations (Scopus)

Abstract

We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-ß line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.
Original languageEnglish
Pages (from-to)317-324
JournalSpectrochimica Acta. Part B : Atomic Spectroscopy
Volume43
Issue number4-5
DOIs
Publication statusPublished - 1988

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