TY - JOUR
T1 - Non equilibrium characterization and spectroscopic analysis of an inductively coupled argon plasma
AU - Mullen, van der, J.J.A.M.
AU - Nowak, S.
AU - van Lammeren, A.C.A.P.
AU - Schram, D.C.
AU - Sijde, van der, B.
PY - 1988
Y1 - 1988
N2 - We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-ß line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.
AB - We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-ß line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.
U2 - 10.1016/0584-8547(88)80061-2
DO - 10.1016/0584-8547(88)80061-2
M3 - Article
SN - 0584-8547
VL - 43
SP - 317
EP - 324
JO - Spectrochimica Acta. Part B : Atomic Spectroscopy
JF - Spectrochimica Acta. Part B : Atomic Spectroscopy
IS - 4-5
ER -