Abstract
We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-ß line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.
Original language | English |
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Pages (from-to) | 317-324 |
Journal | Spectrochimica Acta. Part B : Atomic Spectroscopy |
Volume | 43 |
Issue number | 4-5 |
DOIs | |
Publication status | Published - 1988 |