NHx radical densities and plasma chemistry in a remote Ar-NK3-SiH4 plasma for silicon nitride deposition

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	Proceedings of the 51st International Symposium of the American Vacuum Society (AVC), 14-19 November 2004, Anaheim, U.S.A.
Pages	PS-ThA6
Publication status	Published - 2004

Cite this

Oever, van den, P. J., Helden, van, J. H., Engeln, R. A. H., Schram, D. C., Sanden, van de, M. C. M., & Kessels, W. M. M. (2004). NHx radical densities and plasma chemistry in a remote Ar-NK3-SiH4 plasma for silicon nitride deposition. In Proceedings of the 51st International Symposium of the American Vacuum Society (AVC), 14-19 November 2004, Anaheim, U.S.A. (pp. PS-ThA6)

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title = "NHx radical densities and plasma chemistry in a remote Ar-NK3-SiH4 plasma for silicon nitride deposition",

author = "{Oever, van den}, P.J. and {Helden, van}, J.H. and R.A.H. Engeln and D.C. Schram and {Sanden, van de}, M.C.M. and W.M.M. Kessels",

year = "2004",

language = "English",

pages = "PS--ThA6",

booktitle = "Proceedings of the 51st International Symposium of the American Vacuum Society (AVC), 14-19 November 2004, Anaheim, U.S.A.",

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NHx radical densities and plasma chemistry in a remote Ar-NK3-SiH4 plasma for silicon nitride deposition. / Oever, van den, P.J.; Helden, van, J.H.; Engeln, R.A.H. et al.
Proceedings of the 51st International Symposium of the American Vacuum Society (AVC), 14-19 November 2004, Anaheim, U.S.A.. 2004. p. PS-ThA6.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - NHx radical densities and plasma chemistry in a remote Ar-NK3-SiH4 plasma for silicon nitride deposition

AU - Oever, van den, P.J.

AU - Helden, van, J.H.

AU - Engeln, R.A.H.

AU - Schram, D.C.

AU - Sanden, van de, M.C.M.

AU - Kessels, W.M.M.

PY - 2004

Y1 - 2004

M3 - Conference contribution

SP - PS-ThA6

BT - Proceedings of the 51st International Symposium of the American Vacuum Society (AVC), 14-19 November 2004, Anaheim, U.S.A.

ER -