New Wafer Load Offset Measurement System: Feasibility study of Wafer-BES Touch measurement principle

Yusuf Haryadi

Research output: Thesis › EngD Thesis

Original language	English
Supervisors/Advisors	Weiland, Siep, Supervisor Dijsseldonk, Anton J.J., Supervisor
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 15 Oct 2021

PdEng thesis. Confidential.

Cite this

@phdthesis{2ce409c358f0400f95ef3365569909a1,

title = "New Wafer Load Offset Measurement System: Feasibility study of Wafer-BES Touch measurement principle",

author = "Yusuf Haryadi",

note = "PdEng thesis. Confidential.",

year = "2021",

month = oct,

day = "15",

language = "English",

series = "PdEng Thesis series",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

}