New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films

W.M.M. Kessels; I.M.P. Aarts; J.P.M. Hoefnagels; P.J. Oever, van den; B. Hoex; J.J.H. Gielis; E. Langereis; R.A.H. Engeln; M.C.M. Sanden, van de

New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films

W.M.M. Kessels
, I.M.P. Aarts
, J.P.M. Hoefnagels
, P.J. Oever, van den
, B. Hoex
, J.J.H. Gielis
, E. Langereis
, R.A.H. Engeln
, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	Frontiers in low temperature plasma diagnostics V : Villaggio Cardigliano Specchia (LE) - Italy, April 3-7, 2003 : papers
Pages	40-49
Publication status	Published - 2003

Cite this

Kessels, W. M. M., Aarts, I. M. P., Hoefnagels, J. P. M., Oever, van den, P. J., Hoex, B., Gielis, J. J. H., Langereis, E., Engeln, R. A. H., & Sanden, van de, M. C. M. (2003). New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films. In Frontiers in low temperature plasma diagnostics V : Villaggio Cardigliano Specchia (LE) - Italy, April 3-7, 2003 : papers (pp. 40-49)

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title = "New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films",

author = "W.M.M. Kessels and I.M.P. Aarts and J.P.M. Hoefnagels and \{Oever, van den\}, P.J. and B. Hoex and J.J.H. Gielis and E. Langereis and R.A.H. Engeln and \{Sanden, van de\}, M.C.M.",

year = "2003",

language = "English",

pages = "40--49",

booktitle = "Frontiers in low temperature plasma diagnostics V : Villaggio Cardigliano Specchia (LE) - Italy, April 3-7, 2003 : papers",

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Kessels, WMM, Aarts, IMP, Hoefnagels, JPM, Oever, van den, PJ, Hoex, B, Gielis, JJH, Langereis, E , Engeln, RAH & Sanden, van de, MCM 2003, New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films. in Frontiers in low temperature plasma diagnostics V : Villaggio Cardigliano Specchia (LE) - Italy, April 3-7, 2003 : papers. pp. 40-49.

New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films. / Kessels, W.M.M.; Aarts, I.M.P.; Hoefnagels, J.P.M. et al.
Frontiers in low temperature plasma diagnostics V : Villaggio Cardigliano Specchia (LE) - Italy, April 3-7, 2003 : papers. 2003. p. 40-49.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films

AU - Kessels, W.M.M.

AU - Aarts, I.M.P.

AU - Hoefnagels, J.P.M.

AU - Oever, van den, P.J.

AU - Hoex, B.

AU - Gielis, J.J.H.

AU - Langereis, E.

AU - Engeln, R.A.H.

AU - Sanden, van de, M.C.M.

PY - 2003

Y1 - 2003

M3 - Conference contribution

SP - 40

EP - 49

BT - Frontiers in low temperature plasma diagnostics V : Villaggio Cardigliano Specchia (LE) - Italy, April 3-7, 2003 : papers

ER -