New surface diagnostics for in situ detection of hydrogen and dangling bonds on plasma deposited silicon films

W.M.M. Kessels, I.M.P. Aarts, J.P.M. Hoefnagels, P.J. Oever, van den, B. Hoex, J.J.H. Gielis, E. Langereis, R.A.H. Engeln, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Original languageEnglish
Title of host publicationFrontiers in low temperature plasma diagnostics V : Villaggio Cardigliano Specchia (LE) - Italy, April 3-7, 2003 : papers
Publication statusPublished - 2003

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