New approaches for area-selective atomic layer deposition of oxides

Research output: Contribution to journalMeeting AbstractAcademic

Original languageEnglish
Article number521
JournalAbstracts of Papers of the American Chemical Society
Volume255
Publication statusPublished - 18 Mar 2018
Event

255th ACS National Meeting

- New Orleans Convention Center, New Orleans, United States
Duration: 18 Mar 201822 Mar 2018

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