New approaches for area-selective atomic layer deposition of oxides

Research output: Contribution to journal › Meeting Abstract › Academic

Original language	English
Article number	521
Journal	Abstracts of Papers of the American Chemical Society
Volume	255
Publication status	Published - 18 Mar 2018
Event	255th ACS National Meeting - New Orleans Convention Center, New Orleans, United States Duration: 18 Mar 2018 → 22 Mar 2018

Cite this

@article{c914621a880f482aa95f7aa983893b85,

title = "New approaches for area-selective atomic layer deposition of oxides",

author = "Adrie Mackus",

year = "2018",

month = mar,

day = "18",

language = "English",

volume = "255",

journal = "Abstracts of Papers of the American Chemical Society",

issn = "0065-7727",

publisher = "American Chemical Society",

note = "<p>255th ACS National Meeting </p> ; Conference date: 18-03-2018 Through 22-03-2018",

}

TY - JOUR

T1 - New approaches for area-selective atomic layer deposition of oxides

AU - Mackus, Adrie

PY - 2018/3/18

Y1 - 2018/3/18

M3 - Meeting Abstract

VL - 255

JO - Abstracts of Papers of the American Chemical Society

JF - Abstracts of Papers of the American Chemical Society

SN - 0065-7727

M1 - 521

T2 - <p>255th ACS National Meeting </p>

Y2 - 18 March 2018 through 22 March 2018

ER -