NbN nanowire superconducting single photon detectors fabricated on MgO substrates

F. Marsili; D.M.J. Bitauld; A. Gaggero; R. Leoni; F. Mattioli; S. Hold; M. Benkahoul; F.A. Lévy; A. Fiore

doi:10.1109/CLEOE-IQEC.2007.4386606

NbN nanowire superconducting single photon detectors fabricated on MgO substrates

F. Marsili
, D.M.J. Bitauld
, A. Gaggero
, R. Leoni
, F. Mattioli
, S. Hold
, M. Benkahoul
, F.A. Lévy
, A. Fiore

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2 mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.

Original language	English
Title of host publication	Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany
Place of Publication	Piscataway, New Jersey, USA
Publisher	Institute of Electrical and Electronics Engineers
Pages	4386606-
ISBN (Print)	978-1-424-40931-0
DOIs	https://doi.org/10.1109/CLEOE-IQEC.2007.4386606
Publication status	Published - 2007
Event	2017 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2017 - Messe Munich, Munich, Germany Duration: 25 Jun 2017 → 29 Jun 2017 http://2007.cleoeurope.org/

Conference

Conference	2017 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2017
Abbreviated title	CLEO/Europe-EQEC 2017
Country/Territory	Germany
City	Munich
Period	25/06/17 → 29/06/17
Internet address	http://2007.cleoeurope.org/

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10.1109/CLEOE-IQEC.2007.4386606

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Marsili, F., Bitauld, D. M. J., Gaggero, A., Leoni, R., Mattioli, F., Hold, S., Benkahoul, M., Lévy, F. A., & Fiore, A. (2007). NbN nanowire superconducting single photon detectors fabricated on MgO substrates. In Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany (pp. 4386606-). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CLEOE-IQEC.2007.4386606

Marsili, F. ; Bitauld, D.M.J. ; Gaggero, A. et al. / NbN nanowire superconducting single photon detectors fabricated on MgO substrates. Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany. Piscataway, New Jersey, USA : Institute of Electrical and Electronics Engineers, 2007. pp. 4386606-

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title = "NbN nanowire superconducting single photon detectors fabricated on MgO substrates",

abstract = "High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2 mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.",

author = "F. Marsili and D.M.J. Bitauld and A. Gaggero and R. Leoni and F. Mattioli and S. Hold and M. Benkahoul and F.A. L{\'e}vy and A. Fiore",

year = "2007",

doi = "10.1109/CLEOE-IQEC.2007.4386606",

language = "English",

isbn = "978-1-424-40931-0",

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booktitle = "Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2017 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2017, CLEO/Europe-EQEC 2017 ; Conference date: 25-06-2017 Through 29-06-2017",

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}

Marsili, F, Bitauld, DMJ, Gaggero, A, Leoni, R, Mattioli, F, Hold, S, Benkahoul, M, Lévy, FA & Fiore, A 2007, NbN nanowire superconducting single photon detectors fabricated on MgO substrates. in Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany. Institute of Electrical and Electronics Engineers, Piscataway, New Jersey, USA, pp. 4386606-, 2017 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2017, Munich, Germany, 25/06/17. https://doi.org/10.1109/CLEOE-IQEC.2007.4386606

NbN nanowire superconducting single photon detectors fabricated on MgO substrates. / Marsili, F.; Bitauld, D.M.J.; Gaggero, A. et al.
Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany. Piscataway, New Jersey, USA: Institute of Electrical and Electronics Engineers, 2007. p. 4386606-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - NbN nanowire superconducting single photon detectors fabricated on MgO substrates

AU - Marsili, F.

AU - Bitauld, D.M.J.

AU - Gaggero, A.

AU - Leoni, R.

AU - Mattioli, F.

AU - Hold, S.

AU - Benkahoul, M.

AU - Lévy, F.A.

AU - Fiore, A.

PY - 2007

Y1 - 2007

N2 - High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2 mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.

AB - High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2 mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.

U2 - 10.1109/CLEOE-IQEC.2007.4386606

DO - 10.1109/CLEOE-IQEC.2007.4386606

M3 - Conference contribution

SN - 978-1-424-40931-0

SP - 4386606-

BT - Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway, New Jersey, USA

T2 - 2017 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2017

Y2 - 25 June 2017 through 29 June 2017

ER -

Marsili F, Bitauld DMJ, Gaggero A, Leoni R, Mattioli F, Hold S et al. NbN nanowire superconducting single photon detectors fabricated on MgO substrates. In Proceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany. Piscataway, New Jersey, USA: Institute of Electrical and Electronics Engineers. 2007. p. 4386606- doi: 10.1109/CLEOE-IQEC.2007.4386606

NbN nanowire superconducting single photon detectors fabricated on MgO substrates

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