NbN nanowire superconducting single photon detectors fabricated on MgO substrates

F. Marsili, D.M.J. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, S. Hold, M. Benkahoul, F.A. Lévy, A. Fiore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2 mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.
Original languageEnglish
Title of host publicationProceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany
Place of PublicationPiscataway, New Jersey, USA
PublisherInstitute of Electrical and Electronics Engineers
Pages4386606-
ISBN (Print)978-1-424-40931-0
DOIs
Publication statusPublished - 2007
EventThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2007 - ICM Center of the New Munich Trade Fair Centre, Munich, Germany
Duration: 17 Jun 200717 Jun 2007
http://2007.cleoeurope.org/

Conference

ConferenceThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2007
Abbreviated titleCLEO® 2007
Country/TerritoryGermany
CityMunich
Period17/06/0717/06/07
Internet address

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