NbN nanowire superconducting single photon detectors fabricated on MgO substrates

F. Marsili, D.M.J. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, S. Hold, M. Benkahoul, F.A. Lévy, A. Fiore

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2 mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.
Original languageEnglish
Title of host publicationProceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany
Place of PublicationPiscataway, New Jersey, USA
PublisherInstitute of Electrical and Electronics Engineers
Pages4386606-
ISBN (Print)978-1-424-40931-0
DOIs
Publication statusPublished - 2007
Event2017 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2017 - Messe Munich, Munich, Germany
Duration: 25 Jun 201729 Jun 2017
http://2007.cleoeurope.org/

Conference

Conference2017 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2017
Abbreviated titleCLEO/Europe-EQEC 2017
Country/TerritoryGermany
CityMunich
Period25/06/1729/06/17
Internet address

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