NbN nanowire superconducting single photon detectors fabricated on MgO substrates

D.M.J. Bitauld, F. Marsili, A. Fiore, A. Gaggero, F. Mattioli, R. Leoni, M. Benkahoul, F.A. Lévy

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)


We report on the fabrication and characterization of high performance nanowire superconducting single photon detectors (SSPD) on MgO substrates. The deposition of the superconducting material (NbN) has been performed by magnetron sputtering at 400°C. This deposition temperature is low enough to be compatible with the fabrication on traditional optical materials like GaAs. First, SSPD meanders covering a surface of 5 × 5 µm2 were characterized. We measured quantum efficiencies up to 20% at 1300 nm. Then, we used a straight 250 µm-long NbN nanowire to perform a spatially resolved measurement of the efficiency. Both efficiency dips and peaks were observed. The dips were correlated to lithographic defects, as confirmed by scanning electron microscopy. Conversely, no evidence of a lithographic origin of efficiency peaks was found.
Original languageEnglish
Pages (from-to)395-400
JournalJournal of Modern Optics
Issue number2-3
Publication statusPublished - 2009


Dive into the research topics of 'NbN nanowire superconducting single photon detectors fabricated on MgO substrates'. Together they form a unique fingerprint.

Cite this