Abstract
We demonstrate efficient nanowire superconducting single photon detectors (SSPDs) based on NbN thin films grown on GaAs. NbN films ranging from 3 to 5 nm in thickness have been deposited by dc magnetron sputtering on GaAs substrates at 350¿°C. These films show superconducting properties comparable to similar films grown on sapphire and MgO. In order to demonstrate the potential for monolithic integration, SSPDs were fabricated and measured on GaAs/AlAs Bragg mirrors, showing a clear cavity enhancement, with a peak quantum efficiency of 18.3% at ¿ = 1300 nm and T = 4.2 K.
Original language | English |
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Article number | 151108 |
Pages (from-to) | 151108-1/3 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 97 |
Issue number | 15 |
DOIs | |
Publication status | Published - 2010 |