Abstract
no abstract
| Original language | English |
|---|---|
| Title of host publication | Microfabrication for Industrial Applications |
| Editors | R. Luttge |
| Place of Publication | Boston |
| Publisher | William Andrew Publishing |
| Pages | 91-146 |
| Number of pages | 312 |
| ISBN (Print) | 978-0-8155-1582-1 |
| DOIs | |
| Publication status | Published - 2011 |
Publication series
| Name | Micro and Nano Technologies |
|---|