Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography

Aleksandr Zozulia (Corresponding author), Jeroen Bolk, P.J. (René) van Veldhoven, Gleb Nazarikov, Vadim G. Pogoretskiy , Samir Rihani, Graham Berry, Kevin A. Williams, Yuqing Jiao

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Abstract

We present a novel fabrication approach to an integrated nanophotonic platform, based on a III-V membrane bonded to a Si substrate with benzocyclobutene (BCB). The process incorporates a hybrid lithography strategy combining deep-UV and electron-beam lithography on the same wafer. We report for the first time the usage of deep-UV scanner lithography for the fabrication of the active-passive tapers and sub-micron waveguides on the same wafer, which enables better critical dimension control, uniformity, and reproducibility. The platform uses an active-passive butt-joint interface and includes components such as distributed feedback (DFB) and distributed Bragg reflector (DBR) lasers, electro-optical (EO) and electro-absorption (EA) modulators, and sub-micron ultra-confined passive waveguides, all monolithically integrated into a single membrane layer. The active devices have a heat sink achieved by ultra-thin BCB bonding. Lasers demonstrate up to 26 mW of optical power in the waveguide and a direct modulation bandwidth of up to 21 GHz. The modulators show static extinction up to 28.8 dB.
Original languageEnglish
Article number100258
Number of pages9
JournalMicro and Nano Engineering
Volume23
DOIs
Publication statusPublished - Jun 2024

Funding

This work was supported by Huawei research grant HDMI and the Dutch NWO Zwaartekracht Grant \u201CResearch Center for Integrated Nanophotonics\u201D. The authors would like to thank Nanolab @TU/e for access to the fabrication facilities and Richard Schatz from KTH Stockholm for the LaserMatrix software which was used for laser design.

FundersFunder number
Nederlandse Organisatie voor Wetenschappelijk Onderzoek

    Keywords

    • DFB lasers
    • Electro-optical modulators
    • InP membrane
    • Photonic integration
    • Scanner lithography

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