Nanopatterning of magnetic disks by single-step Ar+ Ion projection

A.H. Dietzel; R. Berger; H. Loeschner; E. Platzgummer; G. Stengl; W.H. Bruenger; F. Letzkus

doi:10.1002/adma.200304943

Nanopatterning of magnetic disks by single-step Ar+ Ion projection

A.H. Dietzel
, R. Berger
, H. Loeschner
, E. Platzgummer
, G. Stengl
, W.H. Bruenger
, F. Letzkus

Microsystems

Research output: Contribution to journal › Article › Academic › peer-review

22 Citations (Scopus)

Abstract

Large-area Ar+ projection has been used to generate planar magnetic nanostructures on a 1¿-format hard disk in a single step (see Figure). The recording pattern was transferred to a Co/Pt multilayer without resist processes or any other contact to the delicate media surface. It is conceivable that magnetic nanostructures can be replicated from a single stencil mask on large quantities of disks for future high-density recording.

Original language	English
Pages (from-to)	1152-1155
Journal	Advanced Materials
Volume	15
Issue number	14
DOIs	https://doi.org/10.1002/adma.200304943
Publication status	Published - 2003

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title = "Nanopatterning of magnetic disks by single-step Ar+ Ion projection",

abstract = "Large-area Ar+ projection has been used to generate planar magnetic nanostructures on a 1¿-format hard disk in a single step (see Figure). The recording pattern was transferred to a Co/Pt multilayer without resist processes or any other contact to the delicate media surface. It is conceivable that magnetic nanostructures can be replicated from a single stencil mask on large quantities of disks for future high-density recording.",

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AU - Dietzel, A.H.

AU - Berger, R.

AU - Loeschner, H.

AU - Platzgummer, E.

AU - Stengl, G.

AU - Bruenger, W.H.

AU - Letzkus, F.

PY - 2003

Y1 - 2003

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AB - Large-area Ar+ projection has been used to generate planar magnetic nanostructures on a 1¿-format hard disk in a single step (see Figure). The recording pattern was transferred to a Co/Pt multilayer without resist processes or any other contact to the delicate media surface. It is conceivable that magnetic nanostructures can be replicated from a single stencil mask on large quantities of disks for future high-density recording.

U2 - 10.1002/adma.200304943

DO - 10.1002/adma.200304943

M3 - Article

SN - 0935-9648

VL - 15

SP - 1152

EP - 1155

JO - Advanced Materials

JF - Advanced Materials

IS - 14

ER -

Nanopatterning of magnetic disks by single-step Ar+ Ion projection

Abstract

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