The different phases of the powder formation in RF (oxygen-)silane plasmas are discussed. Mass spectrometry revealed large negative ions, which are supposed to act as powder precursors. The particle number density and particle sizes as determined by multi-angle polarization sensitive light scattering during the agglomeraton phase can be described by a neutral agglomeration scheme. Finally JR absorption spectroscopy has been used to study the chemical composition of the nanometer particles and has been applied to in-situ oxidation of plasma produced silicon particles.
|Title of host publication
|ICRP-3/SPP-14 : 3rd International Conference on Reactive Plasmas and 14th Symposium on Plasma Processing : proceedings, January 21-24, 1997, Nara, Japan, vol. 4
|K. Tachibana, Y. Watanabe
|Place of Publication
|Published - 1997