Nanometer-accurate planar actuation system (NAPAS)

Research output: Contribution to conferenceAbstract

39 Downloads (Pure)
Original languageEnglish
Pages156
Publication statusPublished - 2016
Event35th Benelux Meeting on system and Control - Kontakt der Kontinenten, Soesterberg, Netherlands
Duration: 22 Mar 201624 Mar 2016

Conference

Conference35th Benelux Meeting on system and Control
CountryNetherlands
CitySoesterberg
Period22/03/1624/03/16

Cite this