Nanometer-accurate planar actuation system (NAPAS)

I. Proimadis, R. Toth

Research output: Contribution to conference › Abstract › Academic

57 Downloads (Pure)
Original languageEnglish
Pages156
Publication statusPublished - 2016
Event35th Benelux Meeting on system and Control - Kontakt der Kontinenten, Soesterberg, Netherlands
Duration: 22 Mar 2016 → 24 Mar 2016

Conference

Conference35th Benelux Meeting on system and Control
Country/TerritoryNetherlands
CitySoesterberg
Period22/03/16 → 24/03/16

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