Nanolithography for oxide nanoarrays and their application in medical devices

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Abstract

Using lithographic patterning techniques, normally we aim for the integration of structural elements into a more complex apparatus, which can be at various length scales, for example hand-held equipment. Nanoscale fabricated pillars, holes or wires have shown unique properties already and ordering these in specific arrangements results in novel phenomena normally not present in natural occuring materials. Such materials are called nanoarrays. Engineered nanoarrays belong therefore to the class of metamaterials. One example of a metamaterial is a material with a negative refractive index created by design of artificial structure. These exciting material properties bring about also new opportunities for applications. A functional device or system demanding some level of ordering in a material also requires a carefully designed manufacturing process. Here, we will present an overview of nanolithographic techniques for oxide nanoarrays. Bio-inspired templated nanoarrays will be described in perspective to other nanolithography techniques. These nanostructures can deliver new functionality, too. Moreover, (nano)structured materials can deliver specific functionality at the interface with biological material. Developing these materials, subsequently, we can look for medical applications where the properties of oxide nanoarrays are explored. Photonic crystals, for example, can be applied in medical diagnostic devices. In this paper, therefore oxide nanoarrays are introduced and the emerging technology for modification and tuning of medical device performance utilizing oxide nanoarrays is discussed. © 2010 Copyright SPIE - The International Society for Optical Engineering.
Original languageEnglish
Title of host publicationOxide-based Materials and Devices, 23 January 2010, San Francisco, California
EditorsF.H. Teherani, D.C. Look, C.W. Litton, D.J. Rogers
Place of PublicationBellingham
PublisherSPIE
Pages76031J-
ISBN (Print)9780819479990
DOIs
Publication statusPublished - 2010
Eventconference; Nanostructured Oxides and their Applications II; 2010-01-23; 2010-01-23 -
Duration: 23 Jan 201023 Jan 2010

Publication series

NameProceedings of SPIE
Volume7603
ISSN (Print)0277-786X

Conference

Conferenceconference; Nanostructured Oxides and their Applications II; 2010-01-23; 2010-01-23
Period23/01/1023/01/10
OtherNanostructured Oxides and their Applications II

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  • Cite this

    Luttge, R. (2010). Nanolithography for oxide nanoarrays and their application in medical devices. In F. H. Teherani, D. C. Look, C. W. Litton, & D. J. Rogers (Eds.), Oxide-based Materials and Devices, 23 January 2010, San Francisco, California (pp. 76031J-). (Proceedings of SPIE; Vol. 7603). Bellingham: SPIE. https://doi.org/10.1117/12.845242