Nanolayers for Germanium Surface Passivation Prepared by Atomic Layer Deposition and Chemical Vapor Deposition

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kessels, W.M.M. (Erwin), Promotor Macco, Bart, Copromotor
Award date	25 Oct 2022
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Print ISBNs	978-90-386-5576-5
Publication status	Published - 25 Oct 2022

Proefschrift. - Embargo pdf open access 25-10-2023.

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title = "Nanolayers for Germanium Surface Passivation Prepared by Atomic Layer Deposition and Chemical Vapor Deposition",

author = "Berghuis, {Wilhelmus Johannes Henricus}",

note = "Proefschrift. - Embargo pdf open access 25-10-2023.",

year = "2022",

month = oct,

day = "25",

language = "English",

isbn = "978-90-386-5576-5",

publisher = "Eindhoven University of Technology",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}

TY - THES

T1 - Nanolayers for Germanium Surface Passivation Prepared by Atomic Layer Deposition and Chemical Vapor Deposition

AU - Berghuis, Wilhelmus Johannes Henricus

N1 - Proefschrift. - Embargo pdf open access 25-10-2023.

PY - 2022/10/25

Y1 - 2022/10/25

M3 - Phd Thesis 1 (Research TU/e / Graduation TU/e)

SN - 978-90-386-5576-5

PB - Eindhoven University of Technology

CY - Eindhoven

ER -