Nano-opto-mechanical sensors for semiconductor metrology

Federico Galeotti

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Fiore, Andrea, Promotor van der Heijden, Rob W., Promotor
Award date	29 Jun 2021
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-53075
Publication status	Published - 29 Jun 2021

Proefschrift.

Access to Document

@phdthesis{79d5e5d5c4af4c2ba281d6d54b276cea,

title = "Nano-opto-mechanical sensors for semiconductor metrology",

author = "Federico Galeotti",

note = "Proefschrift.",

year = "2021",

month = jun,

day = "29",

language = "English",

isbn = "978-90-386-53075",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}