Multiple hollow catode: a novel discharge design for sputtering metal vapour ion lasers

M. Grozeva; D.B. Mihailova; N. Sabotinov

Multiple hollow catode: a novel discharge design for sputtering metal vapour ion lasers

M. Grozeva
, D.B. Mihailova
, N. Sabotinov

Elementary Processes in Gas Discharges

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

No abstract.

Original language	English
Title of host publication	Proceedings 19th International Symposium on Plasma Chemistry (ISPC 19), 26-31 July 2009, Bochum, Germany
Publisher	ISPC
Pages	P1.5.23-1
Publication status	Published - 2009
Event	19th International Symposium on Plasma Chemistry (ISPC 19), July 26-31, 2009, Bochum, Germany - Bochum, Germany Duration: 26 Jul 2009 → 31 Jul 2009

Conference

Conference	19th International Symposium on Plasma Chemistry (ISPC 19), July 26-31, 2009, Bochum, Germany
Abbreviated title	ISPC 19
Country/Territory	Germany
City	Bochum
Period	26/07/09 → 31/07/09

Cite this

@inproceedings{2d423754bfa94b5db52f96b674028f8b,

title = "Multiple hollow catode: a novel discharge design for sputtering metal vapour ion lasers",

abstract = "No abstract.",

author = "M. Grozeva and D.B. Mihailova and N. Sabotinov",

year = "2009",

language = "English",

pages = "P1.5.23--1",

booktitle = "Proceedings 19th International Symposium on Plasma Chemistry (ISPC 19), 26-31 July 2009, Bochum, Germany",

publisher = "ISPC",

note = "19th International Symposium on Plasma Chemistry (ISPC 19), July 26-31, 2009, Bochum, Germany, ISPC 19 ; Conference date: 26-07-2009 Through 31-07-2009",

}

Grozeva, M, Mihailova, DB & Sabotinov, N 2009, Multiple hollow catode: a novel discharge design for sputtering metal vapour ion lasers. in Proceedings 19th International Symposium on Plasma Chemistry (ISPC 19), 26-31 July 2009, Bochum, Germany. ISPC, pp. P1.5.23-1, 19th International Symposium on Plasma Chemistry (ISPC 19), July 26-31, 2009, Bochum, Germany, Bochum, Germany, 26/07/09.

Multiple hollow catode: a novel discharge design for sputtering metal vapour ion lasers. / Grozeva, M.; Mihailova, D.B.; Sabotinov, N.
Proceedings 19th International Symposium on Plasma Chemistry (ISPC 19), 26-31 July 2009, Bochum, Germany. ISPC, 2009. p. P1.5.23-1.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Multiple hollow catode: a novel discharge design for sputtering metal vapour ion lasers

AU - Grozeva, M.

AU - Mihailova, D.B.

AU - Sabotinov, N.

PY - 2009

Y1 - 2009

N2 - No abstract.

AB - No abstract.

M3 - Conference contribution

SP - P1.5.23-1

BT - Proceedings 19th International Symposium on Plasma Chemistry (ISPC 19), 26-31 July 2009, Bochum, Germany

PB - ISPC

T2 - 19th International Symposium on Plasma Chemistry (ISPC 19), July 26-31, 2009, Bochum, Germany

Y2 - 26 July 2009 through 31 July 2009

ER -

Multiple hollow catode: a novel discharge design for sputtering metal vapour ion lasers

Abstract

Conference

Fingerprint

Cite this