Multichannel structures made from micrometre-thick plastic foils

M.W.J. Prins, J.W. Weekamp, J.B. Giesbers

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
33 Downloads (Pure)

Abstract

A method to fabricate multichannel structures based on micrometre-thick plastic foil is described. In a reel-to-reel process, metallized plastic foil is patterned by laser ablation and stacked. Foil-to-foil joints are established by heating the foil stack under pressure. Expansion of the foil stack perpendicular to the plane of the foils yields a multichannel structure. We have realized structures with many thousands of channels with a diameter of a few hundred micrometres. The multichannel structures can serve for mechanical, optical, electrical as well as chemical functions.
Original languageEnglish
Pages (from-to)362-363
JournalJournal of Micromechanics and Microengineering
Volume9
Issue number4
DOIs
Publication statusPublished - 1999

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