| Original language | English |
|---|---|
| Patent number | EP916038 |
| Publication status | Published - 2002 |
Motion damper with electrical amplifier, and lithographic device with such a motion damper
J.C. Compter (Inventor)
Research output: Patent › Patent publication
J.C. Compter (Inventor)
Research output: Patent › Patent publication
| Original language | English |
|---|---|
| Patent number | EP916038 |
| Publication status | Published - 2002 |