Abstract
We have developed various monolithically integrated temperature sensors to locally measure the temperature of InP-based photonic integrated circuits. These sensors are based on InP diodes with either an active multi-quantum well structure or a passive bulk quaternary structure. They have been fabricated in the generic integration process of SMART Photonics. We theoretically and experimentally explored the temperature dependence in the diode characteristics. Our results show that the devices are suitable for on-chip monitoring of the operating temperature of photonic integrated circuits. Integrating a temperature sensor on-chip enables a more local temperature measurement compared to using an external temperature sensor. This should be advantageous for temperature control of photonic integrated circuits.
| Original language | English |
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| Title of host publication | Proceedings of the 26th IEEE Photonics Benelux Annual Symposium |
| Pages | 1-4 |
| Number of pages | 4 |
| Publication status | Published - 24 Nov 2022 |
| Event | 26th Annual Symposium of the IEEE Photonics Benelux Chapter - Eindhoven University of Technology, Eindhoven, Netherlands Duration: 24 Nov 2022 → 25 Nov 2022 https://www.aanmelder.nl/ieee-ps-benelux-2022 |
Conference
| Conference | 26th Annual Symposium of the IEEE Photonics Benelux Chapter |
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| Country/Territory | Netherlands |
| City | Eindhoven |
| Period | 24/11/22 → 25/11/22 |
| Internet address |