Monolithic translation stage device

A.A. Said (Inventor), P. Bado (Inventor), M. Dugan (Inventor), Y.J. Bellouard (Inventor)

Research output: PatentPatent publication

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Abstract

A monolithic device for determining a translation, the monolithic device being fabricated from a single continuous piece of a glass substrate. The monolithic device comprises at least one frame, a moving platform linked to the at least one frame and an optical transducer. The at least one frame is fabricated from the glass substrate. The moving platform is fabricated from the glass substrate, wherein the moving platform is linked to the at least one frame via at least one elastic hinge. The at least one elastic hinge is also fabricated from the glass substrate. The optical transducer is imbedded into the moving platform and the at least one frame.
Original languageEnglish
Patent numberUS7409118
Publication statusPublished - 8 May 2008

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