Monolithic three dimensional dielectrophoretic actuator for positioning optics fabricated by femtosecond laser

T. Yang, Y.J. Bellouard

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	Proceedings of the 2014 Conference on Lasers and Electro-Optics (CLEO), 8-13 June 2014, San Jose, California
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	AW1H.5-1/2
Publication status	Published - 2014

Cite this

@inproceedings{d9bb101fb6024a03b2e008f4a08d3b01,

title = "Monolithic three dimensional dielectrophoretic actuator for positioning optics fabricated by femtosecond laser",

author = "T. Yang and Y.J. Bellouard",

year = "2014",

language = "English",

pages = "AW1H.5--1/2",

booktitle = "Proceedings of the 2014 Conference on Lasers and Electro-Optics (CLEO), 8-13 June 2014, San Jose, California",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

}

Monolithic three dimensional dielectrophoretic actuator for positioning optics fabricated by femtosecond laser. / Yang, T.; Bellouard, Y.J.
Proceedings of the 2014 Conference on Lasers and Electro-Optics (CLEO), 8-13 June 2014, San Jose, California. Piscataway: Institute of Electrical and Electronics Engineers, 2014. p. AW1H.5-1/2.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Monolithic three dimensional dielectrophoretic actuator for positioning optics fabricated by femtosecond laser

AU - Yang, T.

AU - Bellouard, Y.J.

PY - 2014

Y1 - 2014

M3 - Conference contribution

SP - AW1H.5-1/2

BT - Proceedings of the 2014 Conference on Lasers and Electro-Optics (CLEO), 8-13 June 2014, San Jose, California

PB - Institute of Electrical and Electronics Engineers

CY - Piscataway

ER -