Monolithic three dimensional dielectrophoretic actuator for positioning optics fabricated by femtosecond laser

T. Yang, Y.J. Bellouard

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Original languageEnglish
Title of host publicationProceedings of the 2014 Conference on Lasers and Electro-Optics (CLEO), 8-13 June 2014, San Jose, California
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Publication statusPublished - 2014

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