Monolithic integration of buried-heterostructures in a generic integrated photonic foundry process

Valeria Rustichelli (Corresponding author), Cosimo Calò, Florian Lemaitre, Stefanos Andreou, Stefanos Andreou, Nicolas Michel, Frederic Pommereau, Huub Ambrosius, Kevin Williams

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

This work demonstrates the integration of buried heterostructure (BH) lasers and semiconductor optical amplifiers (SOAs) in a generic photonic platform. The process-flow necessary for their integration is presented. BH Fabry-Perot lasers fabricated within the platform are fully characterized and compared with shallow-ridge (SR) lasers already available as a standard building block. BH and SR lasers were fabricated on the same wafer sharing the same layer stack. BH lasers showed a reduction in threshold current of 60% and of 40% of thermal resistance. The full integration is then validated by the characterization of a compact an arrayed waveguide grating (AWG) laser-based transmitter consisting of 8 BH-SOAs and a deep-ridge waveguide. The measured free-spectral range (FSR) of the AWG-laser is 900 GHz and the measured channel spacing is 100 GHz. The laser has a threshold current of 15 mA and shows a stable single-mode operation around the central order of the AWG. A side-mode suppression ratio (SMSR) of 57 dB and a linewidth of 1.5 MHz have been achieved.
LanguageEnglish
Article number6100808
Number of pages8
JournalIEEE Journal of Selected Topics in Quantum Electronics
Volume25
Issue number5
DOIs
StatePublished - 9 Jul 2019

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foundries
Foundries
Photonics
Heterojunctions
photonics
Lasers
Arrayed waveguide gratings
lasers
waveguides
ridges
Semiconductor optical amplifiers
gratings
threshold currents
light amplifiers
platforms
Ridge waveguides
thermal resistance
Heat resistance
Linewidth
transmitters

Cite this

@article{55642cf1d5694e91aabb702619c1c83d,
title = "Monolithic integration of buried-heterostructures in a generic integrated photonic foundry process",
abstract = "This work demonstrates the integration of buried heterostructure (BH) lasers and semiconductor optical amplifiers (SOAs) in a generic photonic platform. The process-flow necessary for their integration is presented. BH Fabry-Perot lasers fabricated within the platform are fully characterized and compared with shallow-ridge (SR) lasers already available as a standard building block. BH and SR lasers were fabricated on the same wafer sharing the same layer stack. BH lasers showed a reduction in threshold current of 60{\%} and of 40{\%} of thermal resistance. The full integration is then validated by the characterization of a compact an arrayed waveguide grating (AWG) laser-based transmitter consisting of 8 BH-SOAs and a deep-ridge waveguide. The measured free-spectral range (FSR) of the AWG-laser is 900 GHz and the measured channel spacing is 100 GHz. The laser has a threshold current of 15 mA and shows a stable single-mode operation around the central order of the AWG. A side-mode suppression ratio (SMSR) of 57 dB and a linewidth of 1.5 MHz have been achieved.",
author = "Valeria Rustichelli and Cosimo Cal{\`o} and Florian Lemaitre and Stefanos Andreou and Stefanos Andreou and Nicolas Michel and Frederic Pommereau and Huub Ambrosius and Kevin Williams",
year = "2019",
month = "7",
day = "9",
doi = "10.1109/JSTQE.2019.2927576",
language = "English",
volume = "25",
journal = "IEEE Journal of Selected Topics in Quantum Electronics",
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Monolithic integration of buried-heterostructures in a generic integrated photonic foundry process. / Rustichelli, Valeria (Corresponding author); Calò, Cosimo; Lemaitre, Florian; Andreou, Stefanos; Andreou, Stefanos; Michel, Nicolas ; Pommereau, Frederic; Ambrosius, Huub; Williams, Kevin.

In: IEEE Journal of Selected Topics in Quantum Electronics, Vol. 25, No. 5, 6100808, 09.07.2019.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Monolithic integration of buried-heterostructures in a generic integrated photonic foundry process

AU - Rustichelli,Valeria

AU - Calò,Cosimo

AU - Lemaitre,Florian

AU - Andreou,Stefanos

AU - Andreou,Stefanos

AU - Michel,Nicolas

AU - Pommereau,Frederic

AU - Ambrosius,Huub

AU - Williams,Kevin

PY - 2019/7/9

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N2 - This work demonstrates the integration of buried heterostructure (BH) lasers and semiconductor optical amplifiers (SOAs) in a generic photonic platform. The process-flow necessary for their integration is presented. BH Fabry-Perot lasers fabricated within the platform are fully characterized and compared with shallow-ridge (SR) lasers already available as a standard building block. BH and SR lasers were fabricated on the same wafer sharing the same layer stack. BH lasers showed a reduction in threshold current of 60% and of 40% of thermal resistance. The full integration is then validated by the characterization of a compact an arrayed waveguide grating (AWG) laser-based transmitter consisting of 8 BH-SOAs and a deep-ridge waveguide. The measured free-spectral range (FSR) of the AWG-laser is 900 GHz and the measured channel spacing is 100 GHz. The laser has a threshold current of 15 mA and shows a stable single-mode operation around the central order of the AWG. A side-mode suppression ratio (SMSR) of 57 dB and a linewidth of 1.5 MHz have been achieved.

AB - This work demonstrates the integration of buried heterostructure (BH) lasers and semiconductor optical amplifiers (SOAs) in a generic photonic platform. The process-flow necessary for their integration is presented. BH Fabry-Perot lasers fabricated within the platform are fully characterized and compared with shallow-ridge (SR) lasers already available as a standard building block. BH and SR lasers were fabricated on the same wafer sharing the same layer stack. BH lasers showed a reduction in threshold current of 60% and of 40% of thermal resistance. The full integration is then validated by the characterization of a compact an arrayed waveguide grating (AWG) laser-based transmitter consisting of 8 BH-SOAs and a deep-ridge waveguide. The measured free-spectral range (FSR) of the AWG-laser is 900 GHz and the measured channel spacing is 100 GHz. The laser has a threshold current of 15 mA and shows a stable single-mode operation around the central order of the AWG. A side-mode suppression ratio (SMSR) of 57 dB and a linewidth of 1.5 MHz have been achieved.

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