Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate

Y.J. Bellouard, A.A. Said, M. Dugan, P. Bado

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

7 Citations (Scopus)
109 Downloads (Pure)

Abstract

We show that locally altering fused silica with femtosecond laser irradiation forms the basis for a novel manufacturing technology platform to produce highly integrated microsystems. In contrast to many common approaches that rely on combining materials to achieve particular functions, our scheme utilizes a single piece of material, whose properties are locally modified using femtosecond laser irradiation. This microsystem fabrication method is not only particularly attractive for optofluidics instruments but also for optomechanical devices.
Original languageEnglish
Title of host publicationInternational Symposium on Optomechatronic Technologies (ISOT 2009), 21- 23 September 2009, Istanbul
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers
Pages445-450
ISBN (Print)978-1-4244-4209-6
DOIs
Publication statusPublished - 2009

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