Abstract
We show that locally altering fused silica with femtosecond laser irradiation forms the basis for a novel manufacturing technology platform to produce highly integrated microsystems. In contrast to many common approaches that rely on combining materials to achieve particular functions, our scheme utilizes a single piece of material, whose properties are locally modified using femtosecond laser irradiation. This microsystem fabrication method is not only particularly attractive for optofluidics instruments but also for optomechanical devices.
Original language | English |
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Title of host publication | International Symposium on Optomechatronic Technologies (ISOT 2009), 21- 23 September 2009, Istanbul |
Place of Publication | Piscataway, NJ |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 445-450 |
ISBN (Print) | 978-1-4244-4209-6 |
DOIs | |
Publication status | Published - 2009 |