Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate

Y.J. Bellouard; A.A. Said; M. Dugan; P. Bado

doi:10.1109/ISOT.2009.5326161

Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate

Y.J. Bellouard, A.A. Said, M. Dugan, P. Bado

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

9 Citations (Scopus)

155 Downloads (Pure)

Abstract

We show that locally altering fused silica with femtosecond laser irradiation forms the basis for a novel manufacturing technology platform to produce highly integrated microsystems. In contrast to many common approaches that rely on combining materials to achieve particular functions, our scheme utilizes a single piece of material, whose properties are locally modified using femtosecond laser irradiation. This microsystem fabrication method is not only particularly attractive for optofluidics instruments but also for optomechanical devices.

Original language	English
Title of host publication	International Symposium on Optomechatronic Technologies (ISOT 2009), 21- 23 September 2009, Istanbul
Place of Publication	Piscataway, NJ
Publisher	Institute of Electrical and Electronics Engineers
Pages	445-450
ISBN (Print)	978-1-4244-4209-6
DOIs	https://doi.org/10.1109/ISOT.2009.5326161
Publication status	Published - 2009

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Bellouard, Y. J., Said, A. A., Dugan, M., & Bado, P. (2009). Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate. In International Symposium on Optomechatronic Technologies (ISOT 2009), 21- 23 September 2009, Istanbul (pp. 445-450). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ISOT.2009.5326161

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Bellouard, YJ, Said, AA, Dugan, M & Bado, P 2009, Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate. in International Symposium on Optomechatronic Technologies (ISOT 2009), 21- 23 September 2009, Istanbul. Institute of Electrical and Electronics Engineers, Piscataway, NJ, pp. 445-450. https://doi.org/10.1109/ISOT.2009.5326161

Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate. / Bellouard, Y.J.; Said, A.A.; Dugan, M.; Bado, P.

International Symposium on Optomechatronic Technologies (ISOT 2009), 21- 23 September 2009, Istanbul. Piscataway, NJ : Institute of Electrical and Electronics Engineers, 2009. p. 445-450.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Bellouard YJ, Said AA, Dugan M, Bado P. Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate. In International Symposium on Optomechatronic Technologies (ISOT 2009), 21- 23 September 2009, Istanbul. Piscataway, NJ: Institute of Electrical and Electronics Engineers. 2009. p. 445-450 https://doi.org/10.1109/ISOT.2009.5326161

Monolithic integration in fused silica: When fluidics, mechanics and optics meet in a single substrate

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