Monitoring of Plasma Oxidation dynamics in sub-nanometer Al Layers for MTJs

C.G.C.H.M. Fabrie, C.A.M. Knechten, B.C. Min, H.J.M. Swagten, J.C. Lodder, E.W.J.M. Drift, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	NanoImpuls Scientific Day 2004; Delft, Netherlands, the (2 dec 2004)
Publication status	Published - 2004

Cite this

@inproceedings{cd8096837b654b2485fdf36aaf9b1af6,

title = "Monitoring of Plasma Oxidation dynamics in sub-nanometer Al Layers for MTJs",

author = "C.G.C.H.M. Fabrie and C.A.M. Knechten and B.C. Min and H.J.M. Swagten and J.C. Lodder and {Drift, van der}, E.W.J.M.",

year = "2004",

language = "English",

booktitle = "NanoImpuls Scientific Day 2004; Delft, Netherlands, the (2 dec 2004)",

}