Molecular dynamics study of the growth mechanism of a-C:H layers deposited by an Ar/C2H2 expanding thermal plasma

E. Neyts, A. Bogaerts, R. Gijbels, J. Benedikt, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands
Pages	10-
Publication status	Published - 2005

Cite this

@inproceedings{c37c2e81bd534a9a94461e573133f067,

title = "Molecular dynamics study of the growth mechanism of a-C:H layers deposited by an Ar/C2H2 expanding thermal plasma",

author = "E. Neyts and A. Bogaerts and R. Gijbels and J. Benedikt and {Sanden, van de}, M.C.M.",

year = "2005",

language = "English",

pages = "10--",

booktitle = "Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands",

}

Molecular dynamics study of the growth mechanism of a-C:H layers deposited by an Ar/C2H2 expanding thermal plasma. / Neyts, E.; Bogaerts, A.; Gijbels, R. et al.
Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands. 2005. p. 10-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Molecular dynamics study of the growth mechanism of a-C:H layers deposited by an Ar/C2H2 expanding thermal plasma

AU - Neyts, E.

AU - Bogaerts, A.

AU - Gijbels, R.

AU - Benedikt, J.

AU - Sanden, van de, M.C.M.

PY - 2005

Y1 - 2005

M3 - Conference contribution

SP - 10-

BT - Proceedings of the 27th International Conference on Phenomena in Ionized Gases (ICPIG), 17-22 July 2005, Veldhoven, The Netherlands

ER -