Molecular dynamics simulations for the growth of diamond-like carbon films from low kinetic energy species

E. Neyts, A. Bogaerts, R. Gijbels, J. Benedikt, M.C.M. Sanden, van de

Research output: Contribution to journalArticleAcademicpeer-review

54 Citations (Scopus)

Abstract

In this study, molecular dynamics simulations using the Brenner potential for hydrocarbons have been used to simulate the formation of diamond-like carbon (DLC) films grown from low-energy hydrocarbon radicals (
Original languageEnglish
Pages (from-to)1873-1881
JournalDiamond and Related Materials
Volume13
Issue number10
DOIs
Publication statusPublished - 2004

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