TY - JOUR
T1 - Molecular dynamics simulation of the impact behaviour of various hydrocarbon species on DLC
AU - Neyts, E.
AU - Bogaerts, A.
AU - Gijbels, R.
AU - Benedikt, J.
AU - Sanden, van de, M.C.M.
PY - 2005
Y1 - 2005
N2 - We have investigated the sticking and H-abstraction behaviour of various hydrocarbon species relevant for the growth of thin diamond-like carbon films (DLC) by means of molecular dynamics (MD) simulations, using the updated Brenner potential. These species include C2, C2H, C3, propynylidene (i.e. linear C3H), cyclopropynyl (i.e. cyclic C3H) and cyclopropenylidene (i.e. cyclic C3H2), with low kinetic energies typical for remote type plasma sources.
We demonstrate and explain the different reactivities of these species at the surface (i.e. sticking efficiencies), as well as their ability to remove hydrogen from the surface (i.e. abstractions efficiencies).
AB - We have investigated the sticking and H-abstraction behaviour of various hydrocarbon species relevant for the growth of thin diamond-like carbon films (DLC) by means of molecular dynamics (MD) simulations, using the updated Brenner potential. These species include C2, C2H, C3, propynylidene (i.e. linear C3H), cyclopropynyl (i.e. cyclic C3H) and cyclopropenylidene (i.e. cyclic C3H2), with low kinetic energies typical for remote type plasma sources.
We demonstrate and explain the different reactivities of these species at the surface (i.e. sticking efficiencies), as well as their ability to remove hydrogen from the surface (i.e. abstractions efficiencies).
U2 - 10.1016/j.nimb.2004.10.063
DO - 10.1016/j.nimb.2004.10.063
M3 - Article
SN - 0168-583X
VL - 228
SP - 315
EP - 318
JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
IS - 1-4
ER -