Molecular dynamics simulation of the impact behaviour of various hydrocarbon species on DLC

E. Neyts, A. Bogaerts, R. Gijbels, J. Benedikt, M.C.M. Sanden, van de

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Abstract

We have investigated the sticking and H-abstraction behaviour of various hydrocarbon species relevant for the growth of thin diamond-like carbon films (DLC) by means of molecular dynamics (MD) simulations, using the updated Brenner potential. These species include C2, C2H, C3, propynylidene (i.e. linear C3H), cyclopropynyl (i.e. cyclic C3H) and cyclopropenylidene (i.e. cyclic C3H2), with low kinetic energies typical for remote type plasma sources. We demonstrate and explain the different reactivities of these species at the surface (i.e. sticking efficiencies), as well as their ability to remove hydrogen from the surface (i.e. abstractions efficiencies).
Original languageEnglish
Pages (from-to)315-318
JournalNuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume228
Issue number1-4
DOIs
Publication statusPublished - 2005

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