Modelling the dynamics of a MEMS resonator : simulations and experiments

R.M.C. Mestrom, R.H.B. Fey, J.T.M. van Beek, K.L. Phan, H. Nijmeijer

Research output: Contribution to journalArticleAcademicpeer-review

165 Citations (Scopus)
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Abstract

Nonlinearities in MEMS silicon resonators are caused by different effects. Depending on the resonator layout, different nonlinearities may be dominant in the resonator response. Based on experimental results, a modelling approach is proposed to arrive at a nonlinear dynamic model that potentially captures the observed behaviour. Apart from the model, consisting of a mechanical and an electrical (measurement) part, the effect of thermal noise is also estimated. With the proposed model, a quantitative match between the simulation and experimental results is established such that a good starting point is achieved for a more thorough modelling procedure.
Original languageEnglish
Pages (from-to)306-315
Number of pages10
JournalSensors and Actuators, A: Physical
Volume142
Issue number1
DOIs
Publication statusPublished - 2008

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