Modelling sub-micron particle trajectories

High-tech manufacturing processes require very high accuracy and precision, which
makes these processes extremely sensitive to contamination at ever-reducing size
scales. The use of complex mechatronic systems in manufacturing, such as dynamic
robots and moving stages, unavoidably results in the transport of particles.
A numerical model will be developed and subsequently integrated into a classical
Computational Flow Dynamics tool, for more accurate prediction of sub-micron
particle trajectories in particle contamination transport. An experimental set-up
has been developed for model validation, including a visualisation tool for accurate
measuring of particle dynamics.