Modelling of voids in complex radio frequency plasmas

W.J. Goedheer, V. Land, J. Venema

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)

Abstract

In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled complex radiofrequency discharges are discussed and applied to discharges under microgravity. Experiments in the PKE-Nefedov reactor on board the International Space Station, as well as discharges in which gravity is compensated by means of thermophoresis are simulated with a 2-D cylindrically symmetric hydrodynamic model. Kinetic effects are studied with a 1-D Particle-In-Cell plus Monte Carlo model in which capture and scattering by dust grains is included. Simulations with this model address non-local effects and modulated discharges.

Original languageEnglish
Pages (from-to)199-214
Number of pages16
JournalContributions to Plasma Physics
Volume49
Issue number4-5
DOIs
Publication statusPublished - 2009
Externally publishedYes

Keywords

  • Complex plasma
  • Dusty plasma
  • Hydrodynamic modelling
  • Kinetic modelling
  • RF discharges

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