Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma

A. Leroux; W.M.M. Kessels; M.C.M. Sanden, van de; D.C. Schram

Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma

A. Leroux, W.M.M. Kessels, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Original language	English
Title of host publication	ESCAMPIG 14 : 14th European Conference on Atomic and Molecular Physics of Ionized Gases, Malahide, Ireland, August 26-29, 1998 : Abstracts of invited lectures and contributed papers
Editors	D. Riley, C.M.O. Mahony, W.G. Graham
Place of Publication	s.l.
Publisher	European Physical Society (EPS)
Pages	258-259
Publication status	Published - 1998

Cite this

Leroux, A., Kessels, W. M. M., Sanden, van de, M. C. M., & Schram, D. C. (1998). Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma. In D. Riley, C. M. O. Mahony, & W. G. Graham (Eds.), ESCAMPIG 14 : 14th European Conference on Atomic and Molecular Physics of Ionized Gases, Malahide, Ireland, August 26-29, 1998 : Abstracts of invited lectures and contributed papers (pp. 258-259). European Physical Society (EPS).

Leroux, A. ; Kessels, W.M.M. ; Sanden, van de, M.C.M. et al. / Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma. ESCAMPIG 14 : 14th European Conference on Atomic and Molecular Physics of Ionized Gases, Malahide, Ireland, August 26-29, 1998 : Abstracts of invited lectures and contributed papers . editor / D. Riley ; C.M.O. Mahony ; W.G. Graham. s.l. : European Physical Society (EPS), 1998. pp. 258-259

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title = "Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma",

author = "A. Leroux and W.M.M. Kessels and {Sanden, van de}, M.C.M. and D.C. Schram",

year = "1998",

language = "English",

pages = "258--259",

editor = "D. Riley and C.M.O. Mahony and W.G. Graham",

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Leroux, A, Kessels, WMM , Sanden, van de, MCM & Schram, DC 1998, Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma. in D Riley, CMO Mahony & WG Graham (eds), ESCAMPIG 14 : 14th European Conference on Atomic and Molecular Physics of Ionized Gases, Malahide, Ireland, August 26-29, 1998 : Abstracts of invited lectures and contributed papers . European Physical Society (EPS), s.l., pp. 258-259.

Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma. / Leroux, A.; Kessels, W.M.M.; Sanden, van de, M.C.M. et al.
ESCAMPIG 14 : 14th European Conference on Atomic and Molecular Physics of Ionized Gases, Malahide, Ireland, August 26-29, 1998 : Abstracts of invited lectures and contributed papers . ed. / D. Riley; C.M.O. Mahony; W.G. Graham. s.l.: European Physical Society (EPS), 1998. p. 258-259.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma

AU - Leroux, A.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

PY - 1998

Y1 - 1998

M3 - Conference contribution

SP - 258

EP - 259

BT - ESCAMPIG 14 : 14th European Conference on Atomic and Molecular Physics of Ionized Gases, Malahide, Ireland, August 26-29, 1998 : Abstracts of invited lectures and contributed papers

A2 - Riley, D.

A2 - Mahony, C.M.O.

A2 - Graham, W.G.

PB - European Physical Society (EPS)

CY - s.l.

ER -

Leroux A, Kessels WMM , Sanden, van de MCM , Schram DC. Modelling of the formation of cation silicon clusters in an expanding Ar/H2/SiH4 plasma. In Riley D, Mahony CMO, Graham WG, editors, ESCAMPIG 14 : 14th European Conference on Atomic and Molecular Physics of Ionized Gases, Malahide, Ireland, August 26-29, 1998 : Abstracts of invited lectures and contributed papers . s.l.: European Physical Society (EPS). 1998. p. 258-259