Modelling of plasmas with complex chemistry : application to microwave deposition reactors

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kroesen, Gerrit M.W., Promotor van Dijk, Jan, Copromotor
Award date	7 Apr 2014
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3588-0
DOIs	https://doi.org/10.6100/IR771642
Publication status	Published - 7 Apr 2014

Proefschrift

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@phdthesis{a79c20570d794beb937d5bde73c2cda2,

title = "Modelling of plasmas with complex chemistry : application to microwave deposition reactors",

author = "E.H. Kemaneci",

note = "Proefschrift",

year = "2014",

month = apr,

day = "7",

doi = "10.6100/IR771642",

language = "English",

isbn = "978-90-386-3588-0",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}