Modelling of low-pressure CVD processes

C.H.J. Brekel, van den, A.E.T. Kuiper, J. Groot, de, G.W. Veltkamp

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France
EditorsJ.M. Blocher, G.E. Vuilard, G. Wahl
Place of PublicationPennington
PublisherElectrochemical Society, Inc.
Pages131-141
Publication statusPublished - 1981

Publication series

NameProceedings Electrochemical Society
Volume81-7
ISSN (Print)0161-6374

Cite this

Brekel, van den, C. H. J., Kuiper, A. E. T., Groot, de, J., & Veltkamp, G. W. (1981). Modelling of low-pressure CVD processes. In J. M. Blocher, G. E. Vuilard, & G. Wahl (Eds.), Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France (pp. 131-141). (Proceedings Electrochemical Society; Vol. 81-7). Pennington: Electrochemical Society, Inc..
Brekel, van den, C.H.J. ; Kuiper, A.E.T. ; Groot, de, J. ; Veltkamp, G.W. / Modelling of low-pressure CVD processes. Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France. editor / J.M. Blocher ; G.E. Vuilard ; G. Wahl. Pennington : Electrochemical Society, Inc., 1981. pp. 131-141 (Proceedings Electrochemical Society).
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year = "1981",
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Brekel, van den, CHJ, Kuiper, AET, Groot, de, J & Veltkamp, GW 1981, Modelling of low-pressure CVD processes. in JM Blocher, GE Vuilard & G Wahl (eds), Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France. Proceedings Electrochemical Society, vol. 81-7, Electrochemical Society, Inc., Pennington, pp. 131-141.

Modelling of low-pressure CVD processes. / Brekel, van den, C.H.J.; Kuiper, A.E.T.; Groot, de, J.; Veltkamp, G.W.

Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France. ed. / J.M. Blocher; G.E. Vuilard; G. Wahl. Pennington : Electrochemical Society, Inc., 1981. p. 131-141 (Proceedings Electrochemical Society; Vol. 81-7).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Modelling of low-pressure CVD processes

AU - Brekel, van den, C.H.J.

AU - Kuiper, A.E.T.

AU - Groot, de, J.

AU - Veltkamp, G.W.

PY - 1981

Y1 - 1981

M3 - Conference contribution

T3 - Proceedings Electrochemical Society

SP - 131

EP - 141

BT - Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France

A2 - Blocher, J.M.

A2 - Vuilard, G.E.

A2 - Wahl, G.

PB - Electrochemical Society, Inc.

CY - Pennington

ER -

Brekel, van den CHJ, Kuiper AET, Groot, de J, Veltkamp GW. Modelling of low-pressure CVD processes. In Blocher JM, Vuilard GE, Wahl G, editors, Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France. Pennington: Electrochemical Society, Inc. 1981. p. 131-141. (Proceedings Electrochemical Society).