Modelling of low-pressure CVD processes

C.H.J. Brekel, van den, A.E.T. Kuiper, J. Groot, de, G.W. Veltkamp

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France
EditorsJ.M. Blocher, G.E. Vuilard, G. Wahl
Place of PublicationPennington
PublisherElectrochemical Society, Inc.
Publication statusPublished - 1981

Publication series

NameProceedings Electrochemical Society
ISSN (Print)0161-6374

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