Modelling of low-pressure CVD processes

C.H.J. Brekel, van den; A.E.T. Kuiper; J. Groot, de; G.W. Veltkamp

Modelling of low-pressure CVD processes

C.H.J. Brekel, van den, A.E.T. Kuiper, J. Groot, de, G.W. Veltkamp

Mathematics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France
Editors	J.M. Blocher, G.E. Vuilard, G. Wahl
Place of Publication	Pennington
Publisher	Electrochemical Society, Inc.
Pages	131-141
Publication status	Published - 1981

Publication series

Name	Proceedings Electrochemical Society
Volume	81-7
ISSN (Print)	0161-6374

Cite this

Brekel, van den, C. H. J., Kuiper, A. E. T., Groot, de, J., & Veltkamp, G. W. (1981). Modelling of low-pressure CVD processes. In J. M. Blocher, G. E. Vuilard, & G. Wahl (Eds.), Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France (pp. 131-141). (Proceedings Electrochemical Society; Vol. 81-7). Electrochemical Society, Inc..

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title = "Modelling of low-pressure CVD processes",

author = "{Brekel, van den}, C.H.J. and A.E.T. Kuiper and {Groot, de}, J. and G.W. Veltkamp",

year = "1981",

language = "English",

series = "Proceedings Electrochemical Society",

publisher = "Electrochemical Society, Inc.",

pages = "131--141",

editor = "J.M. Blocher and G.E. Vuilard and G. Wahl",

booktitle = "Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France",

address = "United States",

}

Modelling of low-pressure CVD processes. / Brekel, van den, C.H.J.; Kuiper, A.E.T.; Groot, de, J. et al.
Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France. ed. / J.M. Blocher; G.E. Vuilard; G. Wahl. Pennington: Electrochemical Society, Inc., 1981. p. 131-141 (Proceedings Electrochemical Society; Vol. 81-7).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Modelling of low-pressure CVD processes

AU - Brekel, van den, C.H.J.

AU - Kuiper, A.E.T.

AU - Groot, de, J.

AU - Veltkamp, G.W.

PY - 1981

Y1 - 1981

M3 - Conference contribution

T3 - Proceedings Electrochemical Society

SP - 131

EP - 141

BT - Proceedings of the Eighth International Conference on Chemical Vapor Deposition, 1981, Gouvieux, France

A2 - Blocher, J.M.

A2 - Vuilard, G.E.

A2 - Wahl, G.

PB - Electrochemical Society, Inc.

CY - Pennington

ER -