Modelling of an RF plasma shower

M. Atanasova, E.A.D. Carbone, D.B. Mihailova, E. Benova, G. Degrez, J.J.A.M. Mullen, van der

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)

Abstract

A capacitive radiofrequency (RF) discharge at atmospheric pressure is studied by means of a time-dependent, two-dimensional fluid model. The plasma is created in a stationary argon gas flow guided through two perforated electrodes, hence resembling a shower. The inner electrode, the electrode facing the flow entrance, is powered with a frequency of 13.56 MHz, and the outer electrode is grounded. The model solves the mass balance equations for the relevant active species and the electron energy balance equation in conjunction with the Poisson equation for the field sustaining the plasma. The mass balance equations of the active species are calculated using the drift–diffusion–convection approach, thus taking the bulk velocity into account. The velocity field is calculated with the Navier–Stokes module of the Plasimo toolkit. The plasma dynamics is studied in three connected regions; the space between the electrodes, the regions before the powered electrode and the extended region behind the grounded electrode. The effect of the shower holes and the recirculation gas flow on the plasma is examined.
Original languageEnglish
Article number145202
Pages (from-to)145202-1/11
JournalJournal of Physics D: Applied Physics
Volume45
Issue number14
DOIs
Publication statusPublished - 2012

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