Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

E.H. Kemaneci; E.A.D. Carbone; M. Jimenez Diaz; W.A.A.D. Graef; S. Rahimi; J. Dijk, van; G.M.W. Kroesen

doi:10.1088/0022-3727/48/43/435203

Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

E.H. Kemaneci, E.A.D. Carbone, M. Jimenez Diaz, W.A.A.D. Graef, S. Rahimi, J. Dijk, van, G.M.W. Kroesen

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

A microwave-induced oxygen plasma is simulated using both stationary and time-resolved modelling strategies. The stationary model is spatially resolved and it is self-consistently coupled to the microwaves (Jimenez-Diaz et al 2012 J. Phys. D: Appl. Phys . 45 335204), whereas the time-resolved description is based on a global (volume-averaged) model (Kemaneci et al 2014 Plasma Sources Sci. Technol. 23 045002). We observe agreement of the global model data with several published measurements of microwave-induced oxygen plasmas in both continuous and modulated power inputs. Properties of the microwave plasma reactor are investigated and corresponding simulation data based on two distinct models shows agreement on the common parameters. The role of the square wave modulated power input is also investigated within the time-resolved description.

Original language	English
Article number	435203
Pages (from-to)	435203-1/21
Number of pages	21
Journal	Journal of Physics D: Applied Physics
Volume	48
Issue number	43
DOIs	https://doi.org/10.1088/0022-3727/48/43/435203
Publication status	Published - 4 Nov 2015

Keywords

microwave-induced plasma modelling
computational plasma physics
global (volume-averaged) model

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10.1088/0022-3727/48/43/435203

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Kemaneci, E. H., Carbone, E. A. D., Jimenez Diaz, M., Graef, W. A. A. D., Rahimi, S., Dijk, van, J., & Kroesen, G. M. W. (2015). Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models. Journal of Physics D: Applied Physics, 48(43), 435203-1/21. Article 435203. https://doi.org/10.1088/0022-3727/48/43/435203

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title = "Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models",

abstract = "A microwave-induced oxygen plasma is simulated using both stationary and time-resolved modelling strategies. The stationary model is spatially resolved and it is self-consistently coupled to the microwaves (Jimenez-Diaz et al 2012 J. Phys. D: Appl. Phys . 45 335204), whereas the time-resolved description is based on a global (volume-averaged) model (Kemaneci et al 2014 Plasma Sources Sci. Technol. 23 045002). We observe agreement of the global model data with several published measurements of microwave-induced oxygen plasmas in both continuous and modulated power inputs. Properties of the microwave plasma reactor are investigated and corresponding simulation data based on two distinct models shows agreement on the common parameters. The role of the square wave modulated power input is also investigated within the time-resolved description.",

keywords = "microwave-induced plasma modelling, computational plasma physics, global (volume-averaged) model",

author = "E.H. Kemaneci and E.A.D. Carbone and {Jimenez Diaz}, M. and W.A.A.D. Graef and S. Rahimi and {Dijk, van}, J. and G.M.W. Kroesen",

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language = "English",

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Kemaneci, EH, Carbone, EAD, Jimenez Diaz, M, Graef, WAAD, Rahimi, S, Dijk, van, J & Kroesen, GMW 2015, 'Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models', Journal of Physics D: Applied Physics, vol. 48, no. 43, 435203, pp. 435203-1/21. https://doi.org/10.1088/0022-3727/48/43/435203

Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models. / Kemaneci, E.H.; Carbone, E.A.D.; Jimenez Diaz, M. et al.
In: Journal of Physics D: Applied Physics, Vol. 48, No. 43, 435203, 04.11.2015, p. 435203-1/21.

Research output: Contribution to journal › Article › Academic › peer-review

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T1 - Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

AU - Kemaneci, E.H.

AU - Carbone, E.A.D.

AU - Jimenez Diaz, M.

AU - Graef, W.A.A.D.

AU - Rahimi, S.

AU - Dijk, van, J.

AU - Kroesen, G.M.W.

PY - 2015/11/4

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N2 - A microwave-induced oxygen plasma is simulated using both stationary and time-resolved modelling strategies. The stationary model is spatially resolved and it is self-consistently coupled to the microwaves (Jimenez-Diaz et al 2012 J. Phys. D: Appl. Phys . 45 335204), whereas the time-resolved description is based on a global (volume-averaged) model (Kemaneci et al 2014 Plasma Sources Sci. Technol. 23 045002). We observe agreement of the global model data with several published measurements of microwave-induced oxygen plasmas in both continuous and modulated power inputs. Properties of the microwave plasma reactor are investigated and corresponding simulation data based on two distinct models shows agreement on the common parameters. The role of the square wave modulated power input is also investigated within the time-resolved description.

AB - A microwave-induced oxygen plasma is simulated using both stationary and time-resolved modelling strategies. The stationary model is spatially resolved and it is self-consistently coupled to the microwaves (Jimenez-Diaz et al 2012 J. Phys. D: Appl. Phys . 45 335204), whereas the time-resolved description is based on a global (volume-averaged) model (Kemaneci et al 2014 Plasma Sources Sci. Technol. 23 045002). We observe agreement of the global model data with several published measurements of microwave-induced oxygen plasmas in both continuous and modulated power inputs. Properties of the microwave plasma reactor are investigated and corresponding simulation data based on two distinct models shows agreement on the common parameters. The role of the square wave modulated power input is also investigated within the time-resolved description.

KW - microwave-induced plasma modelling

KW - computational plasma physics

KW - global (volume-averaged) model

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JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 43

M1 - 435203

ER -

Modelling of an intermediate pressure microwave oxygen discharge reactor : from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

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