Modeling of microwave induced deposition plasmas

S. Rahimi

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Applied Physics and Science Education
Supervisors/Advisors	Kroesen, Gerrit M.W., Promotor van Dijk, Jan, Copromotor
Award date	7 Apr 2014
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-3589-7
DOIs	https://doi.org/10.6100/IR771643
Publication status	Published - 2014

Access to Document

@phdthesis{5e37c432c9a0441cbd746c6ddafd02c1,

title = "Modeling of microwave induced deposition plasmas",

author = "S. Rahimi",

year = "2014",

doi = "10.6100/IR771643",

language = "English",

isbn = "978-90-386-3589-7",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Applied Physics and Science Education",

}