Abstract
This paper aims to study and develop new plasma-based technology for the next generation of molecular decontamination systems. A capacitively coupled plasma is considered for cleaning using the plasma fluxes directed to the walls. The model used for this purpose is the PLASIMO fluid module applied to a simplified 2-D geometry with pure argon gas. The modeling results are validated by comparison with experimental results and observations. Images of the plasma in the reactor and images of the calculated species distribution are presented.
Original language | English |
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Article number | 6906258 |
Pages (from-to) | 2760-2761 |
Number of pages | 2 |
Journal | IEEE Transactions on Plasma Science |
Volume | 42 |
Issue number | 10 |
DOIs | |
Publication status | Published - 1 Oct 2014 |
Keywords
- Plasma applications
- plasma cleaning
- plasma modelling
- plasma simulation
- plasma-surface interaction
- plasmas