Modeling dopant diffusion in strained and strain-relaxed epi-SiGe

Yi Ming Sheu, Tsung Yi Huang, Yu Ping Hu, Chih Chiang Wang, Sally Liu, Ray Duffy, Anco Heringa, Fred Roozeboom, Nick E.B. Cowern, Peter B. Griffin

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Mathematics

Engineering & Materials Science